The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2007
Filed:
Jun. 07, 2004
Applicant:
Daniel Lynne Towery, Penang, MY;
Inventor:
Daniel Lynne Towery, Penang, MY;
Assignee:
SilTerra, Kulim, MY;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 47/26 (2006.01); B24B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A chemical mechanical polishing apparatus includes a polishing pad. A pad conditioner includes a static conditioner head having a surface area configured to contact and condition the pad. The surface area has a first end proximate to an axis of rotation of the pad and a second end remote from the axis of rotation of the pad. The first end defines a first arc length, and the second end defines a second arc length, where the first arc length and the second arc length are substantially identical.