Liquid-jet head, method of manufacturing the same and liquid-jet apparatus

Abstract

A liquid-jet head, a manufacturing method thereof and a liquid-jet apparatus are provided, the liquid-jet head capable of preventing damage to a vibration plate, easily and surely preventing damage to a piezoelectric element attributable to an external environment, simplifying a manufacturing process and improving a withstand voltage of the piezoelectric element. In the liquid-jet head including a passage-forming substratein which a pressure generating chambercommunicating with a nozzle orificeis defined; and a piezoelectric elementwhich is constituted of a lower electrodea piezoelectric layerand an upper electrodeand is provided on the passage-forming substratewith vibration platesandinterposed therebetween, the piezoelectric elementis made of a thin film directly formed on the vibration platesandby deposition and a lithography method without an adhesive agent interposed therebetween; a junction plateis joined onto a draw-out wiringdrawn out of the piezoelectric elementon the piezoelectric element-facing side of the passage-forming substratewith an insulating adhesive agentinterposed therebetween; only a side face of the piezoelectric elementis covered with an adhesion layermade of an adhesive agentjoining the junction plateso as not to expose at least the piezoelectric layer; and thus the piezoelectric elementis sealed.