The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Apr. 21, 2000
Khoi Phan, San Jose, CA (US);
Bharath Rangarajan, Santa Clara, CA (US);
Bhanwar Singh, Morgan Hill, CA (US);
Bryan Choo, Mountain View, CA (US);
Khoi Phan, San Jose, CA (US);
Bharath Rangarajan, Santa Clara, CA (US);
Bhanwar Singh, Morgan Hill, CA (US);
Bryan Choo, Mountain View, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
The present invention relates to visually monitoring an interior portion of a processing chamber in a semiconductor processing system. An image collector collects images of the interior of the chamber and provides an image signal indicative of a visual representation of the interior of the chamber. A viewing station receives the image signal and displays a visual representation of the interior of the chamber.