The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Jan. 27, 2006
Christopher W Fay, Seattle, WA (US);
Anthony D Monk, Seattle, WA (US);
Clifford C Olmsted, Seattle, WA (US);
Edward G Sergoyan, Mukilteo, WA (US);
Christopher W Fay, Seattle, WA (US);
Anthony D Monk, Seattle, WA (US);
Clifford C Olmsted, Seattle, WA (US);
Edward G Sergoyan, Mukilteo, WA (US);
The Boeing Company, Chicago, IL (US);
Abstract
A measurement device for measuring a thickness of a film layer over a substrate utilizes a microwave source and a resonant cavity having an open side. A microwave signal is introduced at a first end of the resonant cavity with the open side against a surface measurement sample having a film layer over a substrate, and an output signal detector senses the output power of the signal at a far end of the resonant cavity. A processor uses a difference in the resulting resonant frequency of the cavity from that using a substrate without the film layer to determine the thickness of the film layer.