The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Mar. 23, 2005
Applicants:
Jochen Alkemper, Klein-Winternheim, DE;
Joerg Schuhmacher, Kornwestheim, DE;
Hrabanus Hack, Mainz, DE;
Oliver Sohr, Mainz, DE;
Inventors:
Jochen Alkemper, Klein-Winternheim, DE;
Joerg Schuhmacher, Kornwestheim, DE;
Hrabanus Hack, Mainz, DE;
Oliver Sohr, Mainz, DE;
Assignee:
Schott AG, Mainz, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 3/06 (2006.01); C03B 20/00 (2006.01); C03B 25/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention discloses an SiO—TiOglass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.