The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Mar. 27, 2001
Hee-sik Sohn, Seoul, KR;
Wayne H. Choe, Champaign, IL (US);
Hee-Sik Sohn, Seoul, KR;
Wayne H. Choe, Champaign, IL (US);
Small Business Corporation, , KR;
Abstract
Disclosed herewith is a diamond film depositing apparatus using microwaves and plasma. The apparatus comprises a rectangular wave guide (), a mode transition coupler (), an antenna rod (), a quartz bell jar (), a workpiece holder (), a microwave cavity resonator (), a source gas inflow ring (), a mechanical support cylinder (), a cooling jacket (), gas inflow and outflow conduits (and) and a vacuum seal (). The microwave cavity resonator () has a cylindrical shape the diameter of which is decreased in a downward direction. The microwave cavity resonator () may have a hemispherical shape, the flat surface of which is oriented upward.