The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Oct. 01, 2004
Shinji Kishimura, Hyogo, JP;
Masayuki Endo, Osaka, JP;
Masaru Sasago, Osaka, JP;
Mitsuru Ueda, Tokyo, JP;
Hirokazu Imori, Aichi, JP;
Toshiaki Fukuhara, Kanagawa, JP;
Shinji Kishimura, Hyogo, JP;
Masayuki Endo, Osaka, JP;
Masaru Sasago, Osaka, JP;
Mitsuru Ueda, Tokyo, JP;
Hirokazu Imori, Aichi, JP;
Toshiaki Fukuhara, Kanagawa, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
The base polymer of a resist material contains a polymer compound including a first unit represented by a general formula of the following Chemical Formula 4 and a second unit represented by a general formula of the following Chemical Formula 5: wherein R, Rand Rare the same or different and are a hydrogen atom, a fluorine atom, or a straight-chain alkyl group, a branched or cyclic alkyl group or a fluoridated alkyl group with a carbon number not less than 1 and not more than 20; Ris a straight-chain alkylene group or a branched or cyclic alkylene group with a carbon number not less than 0 and not more than 20; Rand Rare the same or different and are a hydrogen atom, a straight-chain alkyl group, a branched or cyclic alkyl group or a fluoridated alkyl group with a carbon number not less than 1 and not more than 20, or a protecting group released by an acid; Ris a methylene group, an oxygen atom, a sulfur atom or —SO—; R, R, Rand Rare the same or different and are a hydrogen atom, a fluorine atom, a hydroxyl group, —OR, COR, —R—ORor —R—COR, at least one of R, R, Rand Rincluding —OR, —COR, —R—ORor —R—COR(wherein R 2 is a straight-chain alkylene group, a branched or cyclic alkylene group or a fluoridated alkylene group with a carbon number not less than 1 and not more than 20 and Ris a hydrogen atom, a straight-chain alkyl group, a branched or cyclic alkyl group or a fluoridated alkyl group with a carbon number not less than 1 and not more than 20, or a protecting group released by an acid); 0<a<1; 0<b<1; and c is 0 or 1.