The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Nov. 08, 2002
Applicants:
Michael J. Parent, Oakdale, MN (US);
Patricia M. Savu, Maplewood, MN (US);
Richard M. Flynn, Mahtomedi, MN (US);
Inventors:
Michael J. Parent, Oakdale, MN (US);
Patricia M. Savu, Maplewood, MN (US);
Richard M. Flynn, Mahtomedi, MN (US);
Assignee:
3M Innovative Properties Company, St. Paul, MN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C09K 13/04 (2006.01); C09K 13/06 (2006.01); H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention is directed to certain fluorinated surfactants, and use thereof in acid etch solutions, such as in aqueous buffered acid etch solutions. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.