The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Feb. 21, 2002
Applicants:
Frank Menzel, Hanau, DE;
Wolfgang Lortz, Waechtersbach, DE;
Helmut Mangold, Rodenbach, DE;
Inventors:
Assignee:
Degussa AG, Duesseldorf, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C09K 3/14 (2006.01); C09G 1/02 (2006.01); C01B 33/193 (2006.01); H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
Aqueous dispersion containing a silicon-aluminum mixed oxide powder, the powder containing 0.1 to 99.9 wt. % AlOand Si—O—Al-bonds. The dispersion can be produced using dispersing and/or grinding devices which a achieve an energy input of at least 200 KJ/m. The dispersion can be used for the chemical-mechanical polishing of semiconductor substrates.