The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Jul. 26, 2002
Toshihiko Miura, Kiyose, JP;
Hiroshi Kubo, Tokorozawa, JP;
Kinya Kato, Kanagawa, JP;
Masahiro Kawaguchi, Kanagawa, JP;
Akira Kuriyama, Kanagawa, JP;
Toshihiko Miura, Kiyose, JP;
Hiroshi Kubo, Tokorozawa, JP;
Kinya Kato, Kanagawa, JP;
Masahiro Kawaguchi, Kanagawa, JP;
Akira Kuriyama, Kanagawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A decomposition apparatus that decomposes a decomposition target is provided. The decomposition apparatus includes a decomposition chamber having a decomposition section that continuously decomposes the decomposition target, an introducing device that continuously introduces the decomposition target into the decomposition chamber, a discharging device that discharges decomposition products produced in the decomposition chamber, and a selection section that selects a set of drive conditions from a plurality of sets of conditions for the decomposition section such that the concentration of the decomposition target within the decomposition chamber during decomposition of the decomposition target is at the predetermined concentration. When the concentration of the decomposition target is the predetermined concentration during decomposition in the decomposition section under the set of drive conditions selected by the selection section, the amount per unit time of the decomposition target that is taken into the liquid within the decomposition chamber is in equilibrium with the amount per unit time of the decomposition target that is decomposed within the decomposition chamber.