The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Jan. 30, 2004
Thomas M. Weeks, Gilbert, AZ (US);
Lewis C. Barnett, Tempe, AZ (US);
Loren R. Jacobs, Chandler, AZ (US);
Eric R. Wood, Queen Creek, AZ (US);
Michael W. Halpin, Scottsdale, AZ (US);
Thomas M. Weeks, Gilbert, AZ (US);
Lewis C. Barnett, Tempe, AZ (US);
Loren R. Jacobs, Chandler, AZ (US);
Eric R. Wood, Queen Creek, AZ (US);
Michael W. Halpin, Scottsdale, AZ (US);
ASM America, Inc., Phoenix, AZ (US);
Abstract
A substrate support assembly positively secures a substrate holder support to a rotation shaft with respect to rotationally applied forces. A substrate holder support is configured to have an opening in a socket into which, when aligned with an indentation in the rotational shaft to form a passage, a retaining member is removably inserted to engage both the socket opening and the shaft indentation. Methods of rotating a substrate while minimizing rotational slippage of the substrate holder support with respect to the shaft are also provided.