The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Nov. 21, 2003
Applicant:
Eric R. Wood, Queen Creek, AZ (US);
Inventor:
Eric R. Wood, Queen Creek, AZ (US);
Assignee:
ASM America, Inc., Phoenix, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor processing chamber having an upper wall, a lower wall, and two side walls. The upper and lower walls each comprise two thin, flat plates that are slightly out of parallel so that the wall has a pitch. The pitches point away from the interior chamber space to enable the chamber to withstand reduced pressures.