The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2007

Filed:

Feb. 26, 2004
Applicants:

Alexander Bietsch, Rueschlikon, CH;

Michael W. Chaw, San Jose, CA (US);

Ashok Lahiri, Cupertino, CA (US);

Ian Robson Mcfadyen, San Jose, CA (US);

Bruno Michel, Adliswil, CH;

Mark C. Thurber, San Jose, CA (US);

Inventors:

Alexander Bietsch, Rueschlikon, CH;

Michael W. Chaw, San Jose, CA (US);

Ashok Lahiri, Cupertino, CA (US);

Ian Robson McFadyen, San Jose, CA (US);

Bruno Michel, Adliswil, CH;

Mark C. Thurber, San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 59/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

UV molding from elastomeric masters on thin bendable backplanes that allow replication of UV-cured resist patterns with high accuracy is disclosed. This design accommodates large substrate topographies, has improved de-molding properties, and facilitates two-in-one lithography and assembly of the sliders on topographically structured elastomeric sticky pads. The combination of sticky pad assembly and two-in-one lithography allows an all-in-one harmony process based on UV-molding. These features cure prior art technical problems of the harmony process while significantly reducing cost.


Find Patent Forward Citations

Loading…