The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 23, 2007

Filed:

Dec. 21, 2000
Applicants:

Guenter Igel, Teningen, DE;

Mirko Lehmann, Freiburg, DE;

Inventors:

Guenter Igel, Teningen, DE;

Mirko Lehmann, Freiburg, DE;

Assignee:

Micronas GmbH, Freiburg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/033 (2006.01); H01L 21/768 (2006.01); H01L 21/60 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
Abstract

According to a method for producing a solid body () including a microstructure (), the surface of a substrate () is provided with a masking layer () that is impermeable to a substance to be applied. The substance is then incorporated into the substrate regions not covered by the masking layer (). A heat treatment is used to diffuse the substance into a substrate region covered by the masking layer () such that a concentration gradient of the substance is created in the substrate region covered by the masking layer (), proceeding from the edge of the masking layer () inward with increasing distance from the edge. The masking layer () is then removed to expose the substrate region under this layer, and a near-surface layer of the substrate () in the exposed substrate region is converted by a chemical conversion reaction into a coating () which has a layer thickness profile corresponding to the concentration gradient of the substance contained in this near-surface layer. A supplementary treatment is implemented in a subsection of the coating () in which the thickness of the coating () is reduced.


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