The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2007

Filed:

May. 24, 2005
Applicants:

Chia-sheng Lee, Taichung, TW;

Han-tu Lin, Wuci Township, Taichung County, TW;

Jia-fam Wong, Hsinchu, TW;

Inventors:

Chia-Sheng Lee, Taichung, TW;

Han-Tu Lin, Wuci Township, Taichung County, TW;

Jia-Fam Wong, Hsinchu, TW;

Assignee:

AU Optronics Corp., Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

An optical microelectromechanical (MEMS) device includes a conductive layer, a dielectric layer, a reflective layer and a plurality of supporters between the dielectric layer and reflective layer. The supporters are tapers, or inversed tapers, having an acute angle, wherein a side surface of one of the supporters and the surface of the dielectric layer form the acute angle. Each supporter comprises a horizontal extending portion connecting to the reflective layer, such that the reflective layer is suspended from the dielectric layer by a predetermined gap.


Find Patent Forward Citations

Lee, Chia-Sheng. (2007). Optical microelectromechanical device and fabrication method thereof (U.S. Patent No. 7164524). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7164524

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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