The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Oct. 02, 2002
Ib-rune Johansen, Oslo, NO;
Britta Grennberg Fismen, Oslo, NO;
Henrik Rogne, Oslo, NO;
Dag Wang, Oslo, NO;
Berit Sundby Avset, Oslo, NO;
Alain Ferber, Haslum, NO;
Ralph W. Bernstein, Bekkestua, NO;
Ib-Rune Johansen, Oslo, NO;
Britta Grennberg Fismen, Oslo, NO;
Henrik Rogne, Oslo, NO;
Dag Wang, Oslo, NO;
Berit Sundby Avset, Oslo, NO;
Alain Ferber, Haslum, NO;
Ralph W. Bernstein, Bekkestua, NO;
Sinvent AS, Trondheim, NO;
Abstract
This invention relates to an optical displacement sensor element, e.g. for use in a pressure sensor or a microphone, comprising two essentially flat surfaces being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensitive Fabry-Perot interferometer. Both of said surfaces are at least partially reflective, and in that said first surface is provided with at least one optical detector, and one of surfaces being provided on an at least partially transparent material.