The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Aug. 06, 2003
Tsutomu Nakanishi, Osaka, JP;
Hirofumi Tajika, Osaka, JP;
Michihiko Hayashi, Fukui, JP;
Satoshi Ouchi, Hyogo, JP;
Tsutomu Nakanishi, Osaka, JP;
Hirofumi Tajika, Osaka, JP;
Michihiko Hayashi, Fukui, JP;
Satoshi Ouchi, Hyogo, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
An angular velocity sensor includes a tuning-fork-shaped substrate (), drivers () that are provided on the arms forming a tuning fork and vibrate the arms; monitors () for detecting vibrations generated by the drivers (); and detectors () for detecting displacement of vibrations made in application of an angular velocity. The drivers (), the monitors (), and the detectors () are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.