The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Nov. 04, 2005
Applicants:
Puneet Kohli, Austin, TX (US);
Mark Rodder, University Park, TX (US);
Rick Wise, Fairview, TX (US);
Amitabh Jain, Allen, TX (US);
Inventors:
Puneet Kohli, Austin, TX (US);
Mark Rodder, University Park, TX (US);
Rick Wise, Fairview, TX (US);
Amitabh Jain, Allen, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
Abstract
In one aspect, the present invention provides a method of forming junctions in a silicon-germanium layer (). In this particular embodiment, the method comprises implanting a dopant () into the silicon-germanium layer () and implanting fluorine () into the silicon-germanium layer ().