The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Sep. 25, 2003
Chang Auck Choi, Daejon-Shi, KR;
Myung Lae Lee, Daejon-Shi, KR;
Chang Kyu Kim, Daejon-Shi, KR;
Chi Hoon Jun, Daejon-Shi, KR;
Youn Tae Kim, Daejon-Shi, KR;
Chang Auck Choi, Daejon-Shi, KR;
Myung Lae Lee, Daejon-Shi, KR;
Chang Kyu Kim, Daejon-Shi, KR;
Chi Hoon Jun, Daejon-Shi, KR;
Youn Tae Kim, Daejon-Shi, KR;
Abstract
An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
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