The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Sep. 10, 2004
Applicants:
Takeshi Okino, Yokohama, JP;
Koji Asakawa, Kawasaki, JP;
Naomi Shida, Minato-Ku, JP;
Toru Ushirogouchi, Yokohama, JP;
Satoshi Saito, Yamato, JP;
Inventors:
Takeshi Okino, Yokohama, JP;
Koji Asakawa, Kawasaki, JP;
Naomi Shida, Minato-Ku, JP;
Toru Ushirogouchi, Yokohama, JP;
Satoshi Saito, Yamato, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
According to the present invention, a resist resin having in its structure a specific bridged-bond-containing aliphatic ring, and a resist composition comprising the same are provided. By using this resist composition, a resist pattern excellent in both transparency against short-wavelength light and dry-etching resistance can be formed by alkali development with high resolution.