The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2007
Filed:
Jul. 08, 2004
Manabu Kudo, Chino, JP;
Osamu Ohara, Shimosuwa-machi, JP;
Manabu Kudo, Chino, JP;
Osamu Ohara, Shimosuwa-machi, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
The invention provides a semiconductor device, which removes troubles occurring when the parasitic capacitance between layered wiring lines with an interlayer insulating film therebetween is reduced, and have a simple structure and high reliability. The electronic device according to the invention can include a semiconductor layer formed on a substrate, a gate insulating layer formed on the semiconductor layer, a gate electrode having a predetermined pattern and formed on the gate insulating layer, an interlayer insulating film formed to cover the gate electrode, a source electrode and a drain electrode formed on the interlayer insulating film. The interlayer insulating film can be mainly made of silicon oxynitride with a nitrogen concentration of atomic percent or higher.