The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2007
Filed:
Dec. 21, 2001
Rita Vos, Tremelo, BE;
Paul Mertens, Bonheiden, BE;
Albrecht Fester, Frankfurt am Main, DE;
Oliver Doll, Heusenstamm, DE;
Bernd Kolbesen, Bad Homburg, DE;
Rita Vos, Tremelo, BE;
Paul Mertens, Bonheiden, BE;
Albrecht Fester, Frankfurt am Main, DE;
Oliver Doll, Heusenstamm, DE;
Bernd Kolbesen, Bad Homburg, DE;
IMEC vzw, Leuven, BE;
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
The present invention is related to a composition comprising an oxidizing compound and a complexing compound with the chemical formula wherein R1, R2, R3 and R4 are selected from the group consisting of H and any organic side chain. The oxidizing compound can be in the form of an aqueous solution. The complexing compound is for complexing metal ions. Metal ions can be present in the solution or in an external medium being contacted with the solution. The present invention can be used for cleaning a semiconductor substrate