The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7160393 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 09, 2007

Filed:

Mar. 24, 2004
Applicant:

Nobuyuki Takahashi, Sagamihara, JP;

Inventor:

Nobuyuki Takahashi, Sagamihara, JP;

Assignee:

CYG Corporation, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); F16J 15/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A vacuum chamber assembly comprises a floor plate, an upper plate, plural props standing on the floor plate to support the upper plate, and side plates closing side opening portions between the props. First connected portions between the floor plate and the props and second connected portions between the upper plate and the props are fixed by screws. Circumferential edge portions of the side opening portions are provided with installation grooves, respectively. A gasket includes side surface sealing portions installed in the installation grooves formed on the circumferential edge portions of the side opening portions, respectively, and connection sealing portions for sealing the first connected portions and the second connected portions. The side plates are fixed to the circumferential edge portions to close the side opening portions via the side surface sealing portions of the gasket, respectively.


Find Patent Forward Citations

Takahashi, Nobuyuki. (2007). Vacuum chamber assembly (U.S. Patent No. 7160393). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7160393

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…