The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2007
Filed:
Aug. 27, 2002
Applicants:
Steven Verhaverbeke, San Francisco, CA (US);
J Kelly Truman, Morgan Hill, CA (US);
Christopher T Lane, San Jose, CA (US);
Sasson R Somekh, Los Altos Hills, CA (US);
Inventors:
Steven Verhaverbeke, San Francisco, CA (US);
J Kelly Truman, Morgan Hill, CA (US);
Christopher T Lane, San Jose, CA (US);
Sasson R Somekh, Los Altos Hills, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of a single wafer wet/dry cleaning apparatus comprising: