The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7159466 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 09, 2007

Filed:

Jun. 10, 2005
Applicants:

Shin Hasegawa, Hadano, JP;

Kazuo Kokumai, Atsugi, JP;

Inventors:

Shin Hasegawa, Hadano, JP;

Kazuo Kokumai, Atsugi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

In a piezo resistance type semiconductor device, a detecting sensitivity and output linearity are improved without increasing a forming region of a diaphragm. In a piezo resistance type semiconductor device having: a diaphragm; a supporting frame which is connected to an external periphery of the diaphragm, supports the diaphragm, and is formed relatively thicker than the diaphragm; and piezo resistance type stress detectors () each for detecting a stress caused when the detector is distorted by deformation of the diaphragm by application of an acceleration or a pressure in the direction perpendicular to the diaphragm, at least a part of the diaphragm is cut off in a position where it is come into contact with the piezo resistance type stress detector and a groove is formed.


Find Patent Forward Citations

Hasegawa, Shin. (2007). Piezo resistance type semiconductor device and its manufacturing method (U.S. Patent No. 7159466). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7159466

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…