The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Dec. 22, 2003
Applicant:
Jerome Hazart, Grenoble, FR;
Inventor:
Jerome Hazart, Grenoble, FR;
Assignee:
Commissariat a l'Energie Atomique, Paris, FR;
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for studying a surface provided with relief features, wherein a measurement spectrum is taken and then compared with test spectra representative of arbitrary structures that are adjusted stepwise. A correlation over representative points of the spectra is selected while optimizing the determination by a hierarchized adjustment of the parameters.