The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Oct. 20, 2004
Applicant:
Satoshi Akimoto, Tochigi, JP;
Inventor:
Satoshi Akimoto, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03B 27/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
A scanning exposure apparatus includes a projection optical system, a stage to move while holding a substrate, a measurement system to measure a position of the substrate in an optical axis direction of the projection optical system, a generation system to generate a driving signal, in which a change amount being controlled to be equal to or less than an upper limit value, to the stage based on the result of measurement by the measurement system, and a setting system to set the upper limit value based on a running status of the stage.