The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Mar. 24, 2004
Hiroyuki Umezawa, Ota, JP;
Masahiro Iseki, Ota, JP;
Daizo Takaoka, Ota, JP;
Tsuyoshi Rakuma, Oizumi-machi, JP;
Mineo Ikematsu, Ota, JP;
Motoyuki Tsuihiji, Ota, JP;
Hirofumi Iinuma, Oizumi-machi, JP;
Hiroyuki Umezawa, Ota, JP;
Masahiro Iseki, Ota, JP;
Daizo Takaoka, Ota, JP;
Tsuyoshi Rakuma, Oizumi-machi, JP;
Mineo Ikematsu, Ota, JP;
Motoyuki Tsuihiji, Ota, JP;
Hirofumi Iinuma, Oizumi-machi, JP;
Sanyo Electric Co., Ltd., Osaka, JP;
Abstract
Object of the preferred embodiment is to remove sol-form microparticles and nitrogen components contained in CMP wastewater. Sol-form microparticle components contained in CMP wastewater are removed by a filtration treatment using a filter device, having a gel-form second filter. Also, nitrogen components in the CMP wastewater are removed by an electrochemical treatment using electrode. The filtration treatment and the electrochemical treatment can be carried out in individual tanks or can be carried out in the same tank. By performing the filtration treatment and the electrochemical treatment in the same tank, a space-saving water treatment device can be provided.