The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Sep. 28, 2002
Applicants:
Peter Müller, Cologne, DE;
Lutz Arndt, Troisdorf, DE;
Inventors:
Peter Müller, Cologne, DE;
Lutz Arndt, Troisdorf, DE;
Assignee:
Leybold Vakuum GmbH, Cologne, DE;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/54 (2006.01); C23C 14/22 (2006.01); C23C 14/56 (2006.01); F04C 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A multi-chamber installation () treats objects under vacuum. An evacuation system () is connected to a plurality of chambers (). To reduce the complexity of the evacuation process, a forepump () has several stages (). Each of said stages is connected to one of the chambers ().