The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Oct. 28, 2004
Yuan Lo, Longtan Township, Taoyuan County, TW;
Kye-chyn Ho, Longtan Township, Taoyuan County, TW;
Lung-yung Lin, Hsinchu, TW;
Chih-wei Tseng, Banciao, TW;
Schiu Sche, Hsinchu, TW;
Yuan Lo, Longtan Township, Taoyuan County, TW;
Kye-Chyn Ho, Longtan Township, Taoyuan County, TW;
Lung-Yung Lin, Hsinchu, TW;
Chih-Wei Tseng, Banciao, TW;
Schiu Sche, Hsinchu, TW;
Chung Shan Institute of Science and Technology, Taoyuan County, TW;
Neostones Micro Fabrication Corporation, Hsinchu, TW;
Abstract
A micro angular rate-sensing device is provided. A vibrator, having a plurality of proof masses connected to a ring, is arranged in a first base. Flexible supporting members connect to the vibrator to suspend the vibrator in the first base. Electrodes drive the vibrator to oscillate and control the oscillation mode of the vibrator in driving mode. Planar electrodes are arranged relative to the proof masses on a second base. The motion of the proof masses relative to the planar electrodes is sensed through the capacitance between the proof masses and the planar electrodes. The resonant structure with greater mass of the device generates greater Coriolis force and increases the sensing area. Thus, the intensity of sensed signals and noise-signal ratio are greatly increased. Furthermore, the device does not rely much on high aspect ratio manufacturing technology. Thus the manufacturing cost is reduced and the yield rate is increased.