The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Dec. 31, 2003
Peter W. Gaudet, West Roxbury, MA (US);
Carol Olsen, Legal Representative, Millis, MA (US);
Michael J. Eacobacci, S. Attleboro, MA (US);
Olive Harvell, Legal Representative, Sudbury, MA (US);
Peter W. Gaudet, West Roxbury, MA (US);
Carol Olsen, legal representative, Millis, MA (US);
Michael J. Eacobacci, S. Attleboro, MA (US);
Olive Harvell, legal representative, Sudbury, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The controller can control the operation of the heater in response to feedback from temperature sensors coupled to the cryopump. The controller can cause the heater to shut-off if a temperature sensor reads out of its normal temperature range.