Scrub cleaning device, scrub cleaning method, and manufacturing method of information recording medium

Abstract

There is disclosed a scrub cleaning device which can reduce cleaning time and which requires no large-scaled device for transferring a substrate to the next cleaning process. The scrub cleaning device comprises: a scrub padprovided with two annular plate scrubbers', and wheels′ for supporting an inner peripheral surface A of the annular plate scrubber and a surface B opposite a scrub surface so that the scrub surfaces of the two annular plate scrubbers′ fit each other, and for rotating the scrubber around-the central shaft of the annular plate scrubber; and a guide member (not shown), disposed along the outer periphery of the scrub pad, for conveying the substrate in the rotation direction of the scrub pad, and the scrub cleaning of the substrate is performed when the substrate held between the two opposite scrubbers′ is conveyed in the rotation direction of the scrubbers′ by rotation of the scrub pad, and rotated by a friction force generated by abutment on the guide member.