The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Jul. 16, 2003
Hiroshi Kouno, Tokyo, JP;
Masahumi Kanahara, Tokyo, JP;
Hiroshi Kouno, Tokyo, JP;
Masahumi Kanahara, Tokyo, JP;
Hoya Corporation, , JP;
Abstract
There is disclosed a scrub cleaning device which can reduce cleaning time and which requires no large-scaled device for transferring a substrate to the next cleaning process. The scrub cleaning device comprises: a scrub padprovided with two annular plate scrubbers', and wheels′ for supporting an inner peripheral surface A of the annular plate scrubber and a surface B opposite a scrub surface so that the scrub surfaces of the two annular plate scrubbers′ fit each other, and for rotating the scrubber around-the central shaft of the annular plate scrubber; and a guide member (not shown), disposed along the outer periphery of the scrub pad, for conveying the substrate in the rotation direction of the scrub pad, and the scrub cleaning of the substrate is performed when the substrate held between the two opposite scrubbers′ is conveyed in the rotation direction of the scrubbers′ by rotation of the scrub pad, and rotated by a friction force generated by abutment on the guide member.