The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Oct. 24, 2003
Koichi Tsukihara, Kanagawa, JP;
Koichi Tatsuki, Kanagawa, JP;
Koichi Tsukihara, Kanagawa, JP;
Koichi Tatsuki, Kanagawa, JP;
Sony Corporation, , JP;
Abstract
A light illuminating apparatus used for a laser annealing apparatus includes a first light splitting unit () and a second light splitting unit () for splitting a sole laser beam into n laser beams, and a synthesis unit () for synthesizing an m'th laser beam, radiated from the first light splitting unit (), and an m'th laser beam radiated from the second light splitting unit (), to each other, where m is an integer not less than 1 and not larger than n. The first light splitting unit () and the second light splitting unit () are formed by the same optical components and are arrayed inverted with respect to each other.