The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2006

Filed:

Oct. 27, 2005
Applicants:

Masamichi Inenaga, Fukuoka, JP;

Yuji Arinaga, Fukuoka, JP;

Shinichi Katsuda, Fukuoka, JP;

Takayuki Imanaka, Fukuoka, JP;

Inventors:

Masamichi Inenaga, Fukuoka, JP;

Yuji Arinaga, Fukuoka, JP;

Shinichi Katsuda, Fukuoka, JP;

Takayuki Imanaka, Fukuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/86 (2006.01);
U.S. Cl.
CPC ...
Abstract

A prealignment sensor comprising a frame fixed to a base and having a U-shape when viewed from its side. A light source is attached to a lower part of the flame. A convex lens is attached to a lower part of an inside of the frame by which diffused light of the light source is transformed into parallel light. A lens holder is provided for fixing the convex lens to the frame. An optical receiver is attached to an upper part of an inside of the frame by which the parallel light is received and is transformed into an electrical signal. A signal processing circuit is attached to the frame by which the electric signal is transformed into a desired displacement magnitude. The frame is formed of aluminum subjected to sulfuric-acid hard alumite treatment and then to steam sealing.


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