The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
May. 25, 2004
Dae-hwan Kim, Hwasung, KR;
Min Heo, Suwon, KR;
Dong-won Shin, Seongnam, KR;
Byeong-hyeon Lee, Suwon, KR;
Dae-Hwan Kim, Hwasung, KR;
Min Heo, Suwon, KR;
Dong-Won Shin, Seongnam, KR;
Byeong-Hyeon Lee, Suwon, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
For fabricating lean-free stacked capacitors, openings are formed through layers of materials including a layer of support material displaced from a bottom of the openings. A respective first electrode is formed for a respective capacitor within each of the openings. The layer of support material is patterned to form support structures around the first electrodes. Masking spacers are formed around exposed top portions of the first electrodes, and exposed portions of the support material are etched away to form the support structures. Such stacked capacitors are applied within a DRAM (dynamic random access memory).