The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Nov. 23, 2004
Applicant:
Tomoya Nishida, Kagoshima, JP;
Inventor:
Tomoya Nishida, Kagoshima, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an etching method, an etching amount is controlled on the basis of the number of times an etching process is performed under the condition that an etching amount is determined independently of an etching time. Accordingly, the etching can be performed in step-by-step manner, whereby enabling the control of the etching amount at high precision.