The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Sep. 05, 2002
Franco Preti, Milan, IT;
Srinivas Yarlagadda, Salem, NE (US);
Franco Preti, Milan, IT;
Srinivas Yarlagadda, Salem, NE (US);
LPE SpA, Milan, IT;
Abstract
A susceptor () for epitaxial growth reactors comprises a body () having a lower base (), an upper top () and some substantially flat side faces (); the side faces are adapted to receive, in predetermined areas (), substrates on which the epitaxial growth develops; body () is provided with edge side regions () defined by couples of adjacent side faces (); along edge side regions () in the upper part of body () there are provided first ribs () adapted to control the flow of reaction gases along side faces (); along edge side regions () in the lower part of body () there are provided second ribs () adapted to control the flow of reaction gases along side faces ().