The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Mar. 18, 2003
Chang Junhua, Nagano, JP;
Takahiro Katakura, Nagano, JP;
Motonori Okumura, Nagano, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
Methods for manufacturing a piezoelectric actuator and a liquid ejecting head. In particular, a substrate, which is to be a vibration plate actuated by a piezoelectric element is prepared. A plurality of chip regions are defined on the substrate. A first common electrode of the piezoelectric element is formed on the substrate. A first piezoelectric layer of the piezoelectric element is formed on the first common electrode. A drive electrode of the piezoelectric element is formed on the first piezoelectric layer. A second piezoelectric layer of the piezoelectric element is formed on the drive electrode. A second common electrode of the piezoelectric element is formed on the second piezoelectric layer. Then, the substrate is cut so as to divide the chip regions from one another. In the aforementioned aspects of the invention, the first and second common electrodes as well as the drive electrode are formed so as not to extend beyond the outline of each of the chip regions.