The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2006
Filed:
Aug. 21, 2002
Hideomi Koinuma, Tokyo, JP;
Masashi Kawasaki, Miyagi, JP;
Tomoteru Fukumura, Miyagi, JP;
Kota Terai, Chiba, JP;
Hideomi Koinuma, Tokyo, JP;
Masashi Kawasaki, Miyagi, JP;
Tomoteru Fukumura, Miyagi, JP;
Kota Terai, Chiba, JP;
Japan Science and Technology Agency, Kawaguchi, JP;
Abstract
A method of adjusting the in-plane lattice constant of a substrate and an in-plane lattice constant adjusted substrate are provided. A crystalline substrate () made of SrTiOis formed at a first preestablished temperature thereon with a first epitaxial thin film () made of a first material, e. g., BaTiO, and then on the first epitaxial thin film () with a second epitaxial thin film () made of a second material, e. g., BaxSrTiO(where 0<x<1), that contains a substance of the first material and another substance which together therewith is capable of forming a solid solution in a preestablished component ratio. Thereafter, the substrate is heat-treated at a second preselected temperature. Heat treated at the second preestablished temperature, the substrate has dislocations () introduced therein and the second epitaxial thin film () has its lattice constant relaxed to a value close to the lattice constant of bulk crystal of the second material. Selecting the ratio of components x of the other substance in the second material allows a desired in-plane lattice constant to be realized.