The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2006
Filed:
Sep. 29, 2004
Hiroshi Koeda, Suwa, JP;
Katsuji Arakawa, Chino, JP;
Kazufumi Oya, Suwa, JP;
Seiko Epson Corporation, , JP;
Abstract
A method for surface treatment includes: a first step in which a surface treatment apparatusand a substratein a state where a front surfaceof the substratefaces the surface treatment apparatusare conveyed to the inside of a decompression chamber to decompress a plurality of concave portions(enclosed spaces); a second step in which the surface treatment apparatusand the substrateare brought out from the inside of the decompression chamber to environment under atmospheric pressure in a state where the substrateis being attracted to the surface treatment apparatuswith the use of a difference between negative pressure inside the concave portionsand atmospheric pressure; and a third step in which the surface treatment is carried out to a back surfaceof the substratewith the substratebeing attracted by the surface treatment apparatus