The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Nov. 23, 2004
Kenji Yasuda, Saitama, JP;
Shinichi Matsuda, Saitama, JP;
Kenji Yasuda, Saitama, JP;
Shinichi Matsuda, Saitama, JP;
Fujinon Corporation, Saitama, JP;
Abstract
The present invention makes it possible to reliably hold a computer-generated hologramand a sample surfacein ideal design positions and to perform interference measurements on the surface shape of the sample surfaceby holding the computer-generated hologramin a predetermined attitude by using a retaining member, and interposing a spacerbetween this retaining member and the object so that relative positioning of both the computer-generated hologramand the sample surfaceis performed. Light transmission type targets used for alignment are respectively disposed on the four corners of the frame body of the CGHand the four corners of the measurement mirror, and the system is devised so that images of these targets can be obtained by an image focusing lensand CCD camera, thus making it possible to check the adjustment of the alignment of the CGHand sample surface