The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Dec. 23, 2003
Applicants:
Khim Hong NG, Singapore, SG;
Chin Ling Pong, Singapore, SG;
Inventors:
Khim Hong Ng, Singapore, SG;
Chin Ling Pong, Singapore, SG;
Assignee:
Systems on Silicon Manufacturing Company Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for etching windowsin a semiconductor devicehaving a metal fuseembedded therein is disclosed. The method is for allowing accurate fuse blowing, in particular laser fuse blowing. The method involves the controlled removal of layers having different phase diffraction characteristics. After treatment, the remaining area between the metal fuseand the etched surface of the semiconductor has substantially uniform phase diffraction characteristics.