The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2006

Filed:

Jul. 19, 2000
Applicants:

Masataka Fukuizumi, Kasugai, JP;

Toru Matoba, Kasugai, JP;

Hiroshi Osuda, Kasugai, JP;

Inventors:

Masataka Fukuizumi, Kasugai, JP;

Toru Matoba, Kasugai, JP;

Hiroshi Osuda, Kasugai, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); B01L 3/02 (2006.01); B01L 11/00 (2006.01); G05D 23/00 (2006.01); G05B 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A chemical solution preparation apparatus for preparing a chemical solution from chemical gas of an industrial chemical grade. A dissolution unit dissolves the chemical gas in pure water, which is contained in a tank. A gas discharge control unit controls the amount of chemical gas discharged from the dissolution unit. A liquid discharge discharges a predetermined amount of the chemical solution from the tank. At least one of the gas discharge control unit and the liquid discharge control unit are operated at substantially the same time as the dissolution unit.


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