The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Dec. 11, 2003
Christopher W. Bergevin, San Jose, CA (US);
Hung-chin Guthrie, Saratoga, CA (US);
Tom King Harris, Iii, Morgan Hill, CA (US);
Ming Jiang, San Jose, CA (US);
John Jaekoyun Yang, Newark, CA (US);
Christopher W. Bergevin, San Jose, CA (US);
Hung-Chin Guthrie, Saratoga, CA (US);
Tom King Harris, III, Morgan Hill, CA (US);
Ming Jiang, San Jose, CA (US);
John Jaekoyun Yang, Newark, CA (US);
Hitachi Global Storage Technologies Netherlands, B.V., Amsterdam, NL;
Abstract
A method of manufacture of magnetic heads which include CoFe elements using CMP is presented. The method includes providing a slurry of AlO, adjusting the concentration of HOin said slurry to within a range of 6–12% by volume and balancing mechanical polishing action. The balancing is done by adjusting the table speed of a mechanical polisher to within a range of 55–90 rpm, and adjusting polishing pressure to within a range of 5–7 psi. Also a magnetic head having elements made of CoFe material made by this method is disclosed.