The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Oct. 29, 2003
Applicants:
Jin Heong Yim, Daejeon-Shi, KR;
Yi Yeol Lyu, Daejeon-Shi, KR;
Jung Bae Kim, Gyeonggi-Do, KR;
Kwang Hee Lee, Gyeonggi-Do, KR;
Inventors:
Jin Heong Yim, Daejeon-Shi, KR;
Yi Yeol Lyu, Daejeon-Shi, KR;
Jung Bae Kim, Gyeonggi-Do, KR;
Kwang Hee Lee, Gyeonggi-Do, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 183/05 (2006.01); C09D 183/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A composition for preparing a porous interlayer dielectric thin film which includes a saccharide or saccharide derivative, a thermo-stable organic or inorganic matrix precursor, and a solvent for dissolving the two solid components. Also provided is a dielectric thin film having evenly distributed nano-pores with a diameter of less than 50 Å, which is required for semiconductor devices.