The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2006
Filed:
Sep. 14, 2004
Pei Tien, Kaohsiung, TW;
Guang-way Jang, Hsinchu, TW;
A K Chu, Kaohsiung, TW;
Jing-yuan Lin, Tuchen, TW;
Ya-hui Lin, Hsinchu, TW;
Mei-chih Hung, Changhua, TW;
Pei Tien, Kaohsiung, TW;
Guang-Way Jang, Hsinchu, TW;
A K Chu, Kaohsiung, TW;
Jing-Yuan Lin, Tuchen, TW;
Ya-Hui Lin, Hsinchu, TW;
Mei-Chih Hung, Changhua, TW;
Industrial Technology Research Institute, Hsinchu Hsien, TW;
Abstract
A variable optical attenuator and a method of manufacturing thereof are described. First, a bottom cladding is formed on a substrate. A waveguide structure having a core region and an attenuation region is subsequently formed on the bottom cladding by photolithography. A top cladding is then formed on the bottom cladding and the waveguide structure, and an electrode is next disposed thereon and is aligned above the attenuation region of the waveguide structure. Further, the waveguide structure is composed of a sol-gel material, which is obtained by mixing a solution of metal alkoxide with a solution of organically modified Si-alkoxide and heating the same.