Surface position detection apparatus and method, and exposure apparatus and device manufacturing method using the exposure apparatus

Abstract

An exposure apparatus for exposing a substrate moving in a scan direction to light directed via an original. The apparatus includes a projection optical system configured to image a pattern of the original on the substrate, a substrate stage configured to hold the substrate and to move, and a detector configured to detect a surface position of the substrate, held and moved in the scan direction at a scan speed by the substrate stage, in a direction parallel to an optical axis of the projection optical system over a detection region preset on the substrate. The apparatus further includes a controller configured to preset the detection region, to change a detection time over which the detector detects a surface position of the substrate based on a change in the scan speed of the substrate stage so that the detector detects a surface position of the substrate over the preset detection region, and to control at least one of a position and a tilt of the substrate stage with respect to the direction parallel to the optical axis based on a detection obtained by the detector.