The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2006
Filed:
Oct. 19, 2004
Applicants:
Satyadev Patel, Sunnyvale, CA (US);
Jonathan Doan, Mountain View, CA (US);
Andrew Huibers, Palo Alto, CA (US);
Inventors:
Satyadev Patel, Sunnyvale, CA (US);
Jonathan Doan, Mountain View, CA (US);
Andrew Huibers, Palo Alto, CA (US);
Assignee:
Reflectivity, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); H01L 29/82 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.