The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2006
Filed:
Mar. 28, 2006
Satoshi Tomimatsu, Kokubunji, JP;
Kaoru Umemura, Musashino, JP;
Yuichi Madokoro, Kokubunji, JP;
Yoshimi Kawanami, Kokubunji, JP;
Yasunori Doi, Kokubunji, JP;
Satoshi Tomimatsu, Kokubunji, JP;
Kaoru Umemura, Musashino, JP;
Yuichi Madokoro, Kokubunji, JP;
Yoshimi Kawanami, Kokubunji, JP;
Yasunori Doi, Kokubunji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A specimen fabrication apparatus including: a specimen chamber, a sample stage in the specimen chamber, to mount a specimen substrate, a transfer unit to extract a micro-specimen from the specimen substrate, and to transfer the micro-specimen, within the specimen chamber; a specimen holder in the specimen chamber, to receive the micro-specimen from the transfer unit, and to have the micro-specimen affixed thereto, and an irradiating optical system to irradiate an ion beam to the specimen substrate or to the micro-specimen affixed to the specimen holder, wherein the transfer unit effects transfer of the micro-specimen from the specimen substrate to the specimen holder, and the irradiating optical system irradiates the ion beam onto the micro-specimen affixed to the specimen holder, while the specimen chamber remains substantially sealed.