The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2006

Filed:

Feb. 11, 2004
Applicant:

Taiji Noda, Osaka, JP;

Inventor:

Taiji Noda, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/265 (2006.01); H01L 21/425 (2006.01); H01L 21/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

An n-type channel diffused layer and an n-type well diffused layer are formed in the top portion of a semiconductor substrate, and a gate insulating film and a gate electrode are formed on the semiconductor substrate. Using the gate electrode as a mask, boron and arsenic are implanted to form p-type extension implanted layers and n-type pocket impurity implanted layers. Fluorine is then implanted using the gate electrode as a mask to form fluorine implanted layers. The resultant semiconductor substrate is subjected to rapid thermal annealing, forming p-type high-density extension diffused layers and n-type pocket diffused layers. Sidewalls and p-type high-density source/drain diffused layers are then formed.


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